deep anisotropic plasma etching
Subject: ELEC / Microelectronics
| Language | Term |
|---|
| DE - German | anisotropes Plasma-Tiefenätzverfahren |
| EN - English | deep anisotropic plasma etching |
| ES - Spanish | grabado anisotrópico profundo |
| FR - French | gravure profonde anisotrope |
| RU - Russian | глубокое анизотропное плазменное травление |
| ZH - Chinese | 各向异性等离子体深刻蚀 |